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University of À¶Ý®ÊÓƵ — Micro-electro-mechanical systems (MEMS) Process Design Handbook Version 5.0 (PDF)

UW-MEMS Design HandbookÌý©ÌýCopyrightÌý2010

Version 5.0

Chapter 1: Gold-Based Surface Micromachining Process

Chapter 2: UW-MEMS Layout Design Guidelines

Chapter 3:ÌýUW-MEMS Layout Example

Chapter 4:ÌýDesign Submission

References