Vendor:听
Model:听
Purpose:听Measuring thin film thickness and optical characteristics
Equipment description:
The Filmetrics F50 is able to map thin-film characteristics such as thin film thickness and optical constants by measuring the reflectance spectrum of a sample. The F50 is equipped with a fully automated sample stage which can accommodate samples up to 8 inches in diameter and can generate up to 2 points per second.
System features:
- Up to 8鈥 wafer handling
- Fully automated sample stage
- Wavelength range from 200 nm to 1100 nm
- Thickness range from 5 nm to 40 碌m (film stack dependent)
FILMETRICS-F50
