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Model:Ìý²Ñ¸é200
±Ê³Ü°ù±è´Ç²õ±ð:ÌýPrecision manual dicing of crystalline substrates
Equipment description:
The OEG MR 200 diamond scriber is a tool to facilitate cutting crystalline materials such as silicon or sapphire. The tool consists of a manual stage with X-Y-θ adjustment with digital micrometers for X and Y directions, a vacuum wafer chuck to hold the sample and an electromagnetically actuated scriber tip. A microscope or videocamera may be used to enable precise scriber placement.
System features and options:
- Video camera with computer display of image and crosshairs