Asgarimoghaddam, H. ., Chen, Q. ., Ye, F. ., Shahin, A. ., Song, B. ., & Musselman, K. P. (2023). Effect of different oxygen precursors on alumina deposited using a spatial atomic layer deposition system for thin-film encapsulation of perovskite solar cells. Nanotechnology, 35(9), 095401.
References
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