Growth of p-doped 2D-Mo S 2 on A l 2 O 3 from spatial atomic layer deposition
| Title | Growth of p-doped 2D-Mo S 2 on A l 2 O 3 from spatial atomic layer deposition |
|---|---|
| Author | |
| Year of Publication |
2024
|
| Journal |
Journal of Vacuum Science & Technology A
|
| Volume |
42
|
| Issue |
2
|
| Download citation |