@article{114, author = {André Maas and Kissan Mistry and Stephan Sleziona and Abdullah Alshehri and Hatameh Asgarimoghaddam and Kevin Musselman and Marika Schleberger}, title = {Growth of p-doped 2D-MoS on metal oxides from spatial atomic layer deposition}, year = {2022}, journal = {arXiv}, pages = {14}, }