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Dr. Sivoththaman is a Professor in the Department of Electrical and Computer Engineering, an Institute of Electrical and Electronic Engineers (IEEE) Student Branch Counselor, and Associate Chair, Graduate Studies, at the University of À¶Ý®ÊÓƵ. He also holds an Ontario Research Chair in Renewable Energy Technologies and Health and is Director of the at the University.
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Research Expertise

• Advanced processing technologies for microelectronic devices and process modeling
• Low-permittivity dielectric films and device integration
• Low-thermal budget, rapid thermal, and optothermal processing in silicon
• Micro-electro-mechanical systems (MEMS) technology, silicon micromachining
• Nanocrystalline semiconductors and nanostructures
• Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology

Department Profile

Contact Information:

• sivoththaman@uwaterloo.ca
• 519-888-4567 ext 35319